trip

X900 mm

Y1000 mm

Z800 mm

Measurement accuracy: （1.7+3L/1000）um

Manual mode: Movement speed: 138mm/s

Measurement speed: 1mm-3mm/s

Automatic mode: Movement speed: 300mm/s

Measurement speed: 1mm-3mm/s

Joystick mode: Movement speed 0-80mm/s

Measurement speed: 0-3mm/s

Micro motion speed: 0-0.05mm/s

Drive acceleration: 1000 mm/s

Maximum combined driving acceleration: 2309mm/s